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  • 2013 Conference on Lasers and Electro-Optics - International Quantum Electronics Conference
  • (Optica Publishing Group, 2013),
  • paper CM_P_27

Hydrogenated amorphous silicon films grown by pulsed laser deposition

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Abstract

Amorphous hydrogenated Si (a-Si:H) thin-film solar cells offer power conversion efficiencies up to 12% and use the advantage of the existing infrastructure of Si industry, therefore they are of high technologic interest. Moreover, amorphous Si is cost-effective compared to crystalline Si and it is only needed in small quantities for thin-film solar cell production on rigid or flexible substrates. Pulsed laser deposition (PLD) is a simple, versatile, and cost-effective technique [1] for the deposition of a-Si:H layers.

© 2013 IEEE

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