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  • 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference
  • (Optica Publishing Group, 2015),
  • paper CE_9_1

Photonic Damascene Process for high-Q SiN Microresonator Fabrication for Nonlinear Photonics

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Abstract

Low loss, planar integrated silicon nitride (SiN) waveguides are current subject of intensive research due to their potential applications in signal processing and telecommunications [1, 2]. Microresonators built with such waveguides offer quality factors above 106 to enable nonlinear processes at watt level input powers and enable chip based, broadband nonlinear frequency comb generation [2, 3].

© 2015 IEEE

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