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  • 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference
  • (Optica Publishing Group, 2015),
  • paper CK_9_2

A Photolithographic High-Q Photonic Crystal Nanocavity Fabricated on a Silicon-on-insulator Structure

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Abstract

To boost the fusion between silicon photonics and photonic crystal (PhC) nanocavity technologies, we must fabricate a PhC nanocavity that satisfies the following two criteria; i) it must be fabricated using a CMOS compatible photolithographic fabrication process (instead of electron-beam lithography) and it must be high-Q. ii) It must be fabricated on a silicon-on-insulator structure to ensure robustness.

© 2015 IEEE

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