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Conferences > CLEO_Europe > 2015 > CM_3 > CM_3_2
  • 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference
  • (Optica Publishing Group, 2015),
  • paper CM_3_2

Micromachining with femtosecond laser higher-order Bessel beams

Weibo Cheng and Pavel Polynkin

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Abstract

Femtosecond laser micromachining has been widely used in diverse application areas such as microfluidics, writing optical waveguides, and optical data storage. Laser beam shaping offers a power means of control over the properties of the machined structures. Examples of the beam shapes that have been used for laser micromachining include Gaussian, fundamental Bessel, vortex, and Airy beams.

© 2015 IEEE

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