Abstract

True three-dimensionally (3D) integrated biochips are crucial for realizing high performance biochemical analysis and cell engineering, which remain ultimate challenges. Femtosecond laser is a promising tool for fabricating 3D biochips, since it can modify the interior of transparent materials in a space-selective manner due to multiphoton absorption and thereby to directly form flexible 3D microstructures inside the materials. Specifically, the femtosecond laser 3D direct writing followed by wet chemical etching (Femtosecond Laser Assisted Wet Etching: FLAE) enables us to directly fabricate 3D microfluidic structures inside glass. Meanwhile, two-photon polymerization (TPP) of photocurable resin can create 3D micro and nanostructures with almost arbitrarily complex shapes.

© 2015 IEEE