Abstract
Using femtosecond (fs) laser systems in burst mode is an efficient technique for micromachining of glasses. A burst consists of a group of fs pulses following each other at picosecond (ps) or nanosecond (ns) time scale. While ps-bursts are more effective in glass welding applications [1], ns-bursts are effective for laser drilling of deep holes in glass [2], and they produce lower mechanical strain around laser affected zone (LAZ) [3].
© 2015 IEEE
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