Abstract
Femtosecond laser machining combined with chemical etching offers an efficient and accurate way for producing complex three-dimensional structures out of fused silica. The versatility of the femtosecond laser machining together with the properties of fused silica makes it an ideal tool for integrating of micromechanical [1], microfluidic [2] and optical [3] devices, using the same fabrication method.
© 2017 IEEE
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