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  • 2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference
  • (Optica Publishing Group, 2017),
  • paper CM_6_3

Combined plasmonic and thermal mechanism of laser-induced nanostructure formation in silicon

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Abstract

Laser-induced formation of surface nanostructures is known for a long time. Responsible mechanisms, however, are not completely understood. Early explanations were based on surface electromagnetic waves [1]. Alternative models were focused on self-organization of non-equilibrium surfaces via nonlinear feedback and material transport [2]. Investigations on volume structures in fused silica and glass [3,4] revealed a plasmon controlled rearrangement of nanobubbles as an interplay of non-thermal and thermal processes. For metals at high fluence, bubbles merge along temporally elastic stripes of maximum carrier density [5].

© 2017 IEEE

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