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Conferences > CLEO_Europe > 2017 > CM_8 > CM_8_3
  • 2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference
  • (Optica Publishing Group, 2017),
  • paper CM_8_3

Laser-slicing of silicon with 3D nonlinear laser lithography

Onur Tokel, Ahmet Turnali, Tahir Çolakoğlu, Serim Ilday, Mona Zolfaghari Borra, Ihor Pavlov, Alpan Bek, Raşit Turan, and F. Ömer Ilday

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Abstract

Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.

© 2017 IEEE

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