Author Affiliations

Maxim Tschernajew,¹ Steffen Hädrich,¹ Robert Klas,^2,3 Martin Gebhardt,^2,3 Roland Horsten,⁴ Sven Werdenburg,⁴ Sergey Pyatchenkov,⁴ Wim Coene,^4,5 Jan Rothhardt,^2,3 Tino Eidam,¹ and Jens Limpert^1,2,3,6

¹Active Fiber Systems GmbH, Ernst-Ruska-Ring 17, 07745 Jena, Germany

²Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany

³Helmholtz-Institute Jena, Fröbelstieg 3, 07743 Jena, Germany

⁴Optics Research Group, Delft University of Technology, 2628 CH, Delft, The Netherlands

⁵ASML Netherlands B.V., P.O. Box 324, 5500 AH Veldhoven, The Netherlands

⁶Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Str. 7, 07745 Jena, Germany