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Conferences > CLEO_Europe > 2021 > ch_10 > ch_10_1
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper ch_10_1

Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects

Carolina Rendón-Barraza, Eng Aik Chan, Guanghui Yuan, Giorgio Adamo, Tanchao Pu, and Nikolay I. Zheludev

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Abstract

We experimentally demonstrate that a linear dimension of a sub-wavelength nanoscale object can be measured with an accuracy of 260 by a deep-learning-enabled examination of its diffraction pattern.

© 2021 IEEE

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