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Conferences > CLEO_Europe > 2021 > ck_4 > ck_4_3
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper ck_4_3

Heterogeneous Integration of Uni-Travelling-Carrier Photodiodes using Micro-Transfer-Printing on a Silicon-Nitride Platform

Dennis Maes, Gunther Roelkens, Mohammed Zaknoune, Camiel Op de Beeck, Stijn Poelman, Maximilien Billet, Muhammad Muneeb, Sam Lemey, Emilien Peytavit, and Bart Kuyken

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Abstract

Uni-travelling-carrier photodiodes UTC PDs are heterogeneously integrated on a silicon-nitride SiN platform using micro-transfer-printing TP. These waveguide-coupled photodiodes feature a high responsivity for a very small footprint and promise high-speed operation into the THz domain.

© 2021 IEEE

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