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Conferences > CLEO_Europe > 2021 > ck_p > ck_p_1
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper ck_p_1

Fabricating WSi based superconducting microwire single photon detectors with laser lithography

Maximilian Protte, Varun B. Verma, Jan Philipp Höpker, Richard P. Mirin, Sae Woo Nam, and Tim J. Bartley

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Abstract

Laser lithography is a versatile tool for developing large-scale integrated optical structures. We show that it is also capable of structuring SNSPDs with saturated internal detection efficiency.

© 2021 IEEE

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