Pulse Duration and Temporal Contrast as Critical Parameters for Internal Structuring of Silicon

Amlan Das; Andong Wang; Olivier Utéza; David Grojo

2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
OSA Technical Digest (Optica Publishing Group, 2021),
paper cm_2_4

Pulse Duration and Temporal Contrast as Critical Parameters for Internal Structuring of Silicon

Amlan Das, Andong Wang, Olivier Utéza, and David Grojo

The European Conference on Lasers and Electro-Optics 2021

Munich Germany
21–25 June 2021
ISBN: 978-1-6654-1876-8

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Semiconductor Processing (cm_2)

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A. Das, A. Wang, O. Utéza, and D. Grojo, "Pulse Duration and Temporal Contrast as Critical Parameters for Internal Structuring of Silicon," in 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, OSA Technical Digest (Optica Publishing Group, 2021), paper cm_2_4.

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Abstract

By synchronizing 1550-nm pulses of durations from 190 fs to 5 ns, we investigate the key dynamical aspects of interactions to achieve 3D laser writing inside silicon.

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