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Conferences > CLEO_Europe > 2021 > cm_4 > cm_4_1
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_4_1

Optical FIB: Far-field fabrication with real-nanoscale spatial resolution in any solid materials

Zhen-Ze Li, Lei Wang, Qi-Dai Chen, and Hong-Bo Sun

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Abstract

we report an optical far-field-induced near-field breakdown technology as is abbreviated as optical FIB. It in principle can be applied to any solid materials to reach 10-nm spatial resolution in femtosecond laser direct writing.

© 2021 IEEE

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