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Conferences > CLEO_Europe > 2021 > cm_6 > cm_6_6
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_6_6

Femtosecond UV laser lift-off technique for GaN coatings

Domas Paipulas, Simas Butkus, and Valdas Sirutkaitis

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Abstract

We present a rapid laser lift-off technique for thin GaN coating separation from sapphire utilizing femtosecond UV pulses and demonstrate that raster patterning can produce high-quality coatings without any stitching artifacts at an industrial processing rate.

© 2021 IEEE

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