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Conferences > CLEO_Europe > 2021 > cm_p > cm_p_14
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_p_14

Ultrafast laser micromachining of x-ray gratings and sub-micron hole patterns with differents beam shapes

Romain Carreto, Beat Lüscher, Ronald Holtz, and Bojan Resan

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Abstract

We compare micromachining results with Gaussian and Bessel beams using an UV 10-picosecond laser system, in order to obtain tungsten gratings for X-ray interferometry medical imaging, and sub-micrometer hole patterns in tungsten foil.

© 2021 IEEE

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