Abstract
Periodic structures were formed on zirconium films with a thickness of 50-170 nm using near-IR femtosecond laser pulses. The dependency of the period and structure uniformity on pulse energy and scanning rate was observed.
© 2021 IEEE
PDF ArticleMore Like This
Camilo Florian, Jean-Luc Déziel, Sabrina V. Kirner, Jan Siegel, and Jörn Bonse
cm_1_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2021
K. Zhou, T. Q. Jia, and X. Jia
27E2_3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2015
Balázs Bánhegyi, László Péter, Zsuzsanna Pápa, and Péter Dombi
cm_p_25 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2021