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Conferences > CLEO_Europe > 2021 > cm_p > cm_p_28
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_p_28

Selective Laser Etching of Crystalline Sapphire for 3D Structure Fabrication

Agnė Butkutė, Beatričė Siaurytė, Domas Paipulas, Romualdas Sirutkaitis, and Valdas Sirutkaitis

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Abstract

Selective laser etching is perspective technology in high quality 3D structures formation in glasses and crystals. However, SLE of crystals is not widely studied. Here we present SLE optimisation for crystalline sapphire processing.

© 2021 IEEE

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