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Conferences > CLEO_Europe > 2021 > cm_p > cm_p_32
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_p_32

Pyrolyzed microstructures made by two-photon polymerization: comparative study

Margarita I. Sharipova, Tigran G. Baluyan, Ksenia A. Abrashitova, Grigory E. Kulagin, Alexander K. Petrov, Artem S. Chizhov, Tatyana B. Shatalova, Dmitry Chubich, Daniil A. Kolymagin, Alexey G. Vitukhnovsky, Vladimir O. Bessonov, and Andrey A. Fedyanin

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Abstract

Two-photon polymerization is a powerful technology to make 3D microstructures. Post-processing pyrolysis enhances both microstructures resolution and chemical composition. We have analyzed shrinkage, elemental composition, survival rate and adhesion of microstructures made of three photoresists.

© 2021 IEEE

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