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Conferences > CLEO_Europe > 2021 > cm_p > cm_p_6
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_p_6

Conical Beams for Directing Chemical Etching along Deeply-Focussed Femtosecond Laser Modification Tracks

Ehsan Alimohammadian, Erden Ertorer, and Peter R. Herman

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Abstract

Conical phase front beam shaping is shown to enable chemical etching control of femtosecond laser modification tracks, compensating for surface aberration, enhancing etching rates, and providing a new means for shaping the cross-sectional channel profile.

© 2021 IEEE

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