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  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_p_9

Time-resolved imaging and simulations of SiO2 films dynamic fracture due to laser-induced confined micro-explosion at Si/SiO2 interface

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Abstract

PECVD SiO2 films on Si substrate irradiated by short laser pulses undergo dynamic fracture due to near-interface micro-explosion resulting in flyer ejection, spallation and fragmentation. The phenomena are investigated using time-resolved imaging and finite-elements simulations.

© 2021 IEEE

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