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  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper jsi_4_1

Surface phonon polariton: the 4th heat carrier in SiN nanofilms

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Abstract

We demonstrate that surface phonon polaritons can be the dominant thermal energy carriers in SiN nanofilms. Their contribution becomes larger in thinner films and at higher temperatures, where phonons contribution becomes less.

© 2021 IEEE

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