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Conferences > CLEO_Europe > 2023 > cb_9 > cb_9_6
  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper cb_9_6

Phase-locked and phase-tuned resonant-MOEMS external cavity QCLs and their application for fast and broadband mid-infrared reflectometry

Y. V. Flores, M. Schwarzenberg, A. Merten, B. Srocka, and M. Haertelt

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Abstract

The combination of broadband quantum cascade lasers (QCLs) with micro-electro-mechanical system (MOEMS) scanners having an integrated diffraction grating as emission-wavelength-selective element enables the realization of very compact, rapidly tuneable, and robust light sources for mid-infrared spectroscopy. In contrast to a motor-driven mechanical grating tuning mechanism, MOEMS scanners do not limit the lifetime of the laser module, as they are made from single-crystalline silicon and undergo no mechanical wear1.

© 2023 IEEE

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