Abstract

Optomechanical resonators have achieved remarkable attention due to their great potential in many applications, such as weak force/displacement/acceleration detection as well as ultrasensitive acoustic wave and biochemical sensing [1,2]. One of its promising application is photoacoustic spectroscopic gas sensing, in which a modulated laser signal may be absorbed by a target gas to generate a weak acoustic wave signal that could be detected by an optomechanical resonator-based acoustic wave sensor. Such photoacoustic spectroscopic gas sensors have advantages of high sensitivity, short interrogation duration, immune to electro-magnetic interference, and applicability in harsh environments. However, the challenge is how to design and fabricate a miniature optomechanical resonator-based photoacoustic spectroscopic gas sensors for applications in space-constrained circumstances.

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