Abstract

On-chip micro-ring resonators (MRRs) with low propagation loss have the potential to revolutionize numerous fields, including microwave photonic filters, optoelectronic oscillators, on-chip soliton micro combs, and Brillouin lasers [5]. For the high confinement Si₃N₄ waveguides, such as the photonic Damascene reflow process, which needs "preform reflow" and substrate annealing to reduce waveguide sidewall roughness and absorption loss [6].

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