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Conferences > CLEO_Europe > 2023 > cm_2 > cm_2_4
  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper cm_2_4

Gap materials drilling with femtosecond laser in GHz-burst mode

Inka Manek-Hönninger, Pierre Balage, Guillaume Bonamis, Clemens Hönninger, and John Lopez

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Abstract

We report novel results on top-down percussion drilling with a GHz-burst mode femtosecond laser in different gap materials including glasses, crystals and silicon. We studied the drilling rates and reachable hole dimensions.

© 2023 IEEE

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