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Conferences > CLEO_Europe > 2023 > cm_2 > cm_2_6
  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper cm_2_6

Inscription and Characterization of Transversely Written Waveguides in Silicon with Picosecond Laser Pulses

Markus Blothe, Maxime Chambonneau, Alessandro Alberucci, Namig Alasgarzade, and Stefan Nolte

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Abstract

The possibility to permanently modify transparent materials and inscribe waveguiding structures with ultrashort laser pulses is well established for dielectrics such as glasses. Such a technique discloses a versatile set of applications, ranging from telecommunications to photonic quantum circuits. Attempts to transfer this 3D ultrafast inscription technique to the most important material in the microelectronics industry, silicon, failed so far for a transverse inscription strategy.

© 2023 IEEE

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