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Mid-Infrared Chemical Sensors On-a-Chip Using Air-clad Pedestal Silicon Waveguides

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Abstract

We demonstrate a chip-scale air-clad silicon pedestal waveguide as a Mid-Infrared sensor capable of in-situ monitoring of organic solvents. From changes in the waveguide mode intensities, identification of chemical compositions and concentrations is achieved.

© 2013 Optical Society of America

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