Abstract
Silicon nanofibers were observed on silicon laser-irradiated in SF6 and allowed to sit for several months at room temperature. The formation mechanism is uncertain; total irradiation time and presence of aluminum appear to be important.
© 2018 The Author(s)
PDF ArticleMore Like This
Nikita Kovalenko, Georgii Aloian, Irina Shebarsina, Alexey Konyashkin, and Oleg Ryabushkin
JT5A.27 Compact EUV & X-ray Light Sources (EUVXRAY) 2018
N.S. Balakleiskiy, N.N. Gerasimenko, and V.V Pirogov
AM6A.6 Advanced Solid State Lasers (ASSL) 2018
Hyun-Woo Song and Jongdeog Kim
OT4A.50 Optoelectronic Devices and Integration (OEDI) 2018