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Frequency-sweeping Interferometry utilizing Optical Frequency Comb and Fourier Transform Phase Retrieving

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Abstract

A precise 3D surface measurement method for large stepped structures without height ambiguity is proposed based on optical frequency comb referenced frequency-sweeping interferometry and Fourier transformed fractional phase retrieval. Samples of from 1 to 1000 microns were measured.

© 2018 The Author(s)

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