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Ultralow Dissipation Mechanical Resonators for Quantum Optomechanics

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Abstract

We demonstrate dissipation dilution engineering techniques for ultralow dissipation mechanical resonators. The Si3N4 nanobeams show quality factors (Q) as high as 800 million and Q × f exceeding 1015 Hz—both records at room temperature.

© 2019 The Author(s)

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