Ring Resonator Based Ultrasound Detection in a Zero-Change Advanced CMOS-SOI Process

Panagiotis Zarkos; Olivia Hsu; Vladimir Stojanović

doi:10.1364/CLEO_AT.2019.JW2A.78

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2019),
paper JW2A.78
•https://doi.org/10.1364/CLEO_AT.2019.JW2A.78

Ring Resonator Based Ultrasound Detection in a Zero-Change Advanced CMOS-SOI Process

Panagiotis Zarkos, Olivia Hsu, and Vladimir Stojanović

CLEO: QELS_Fundamental Science 2019

San Jose, California United States
5–10 May 2019
ISBN: 978-1-943580-57-6

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Poster Session II (JW2A)

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P. Zarkos, O. Hsu, and V. Stojanović, "Ring Resonator Based Ultrasound Detection in a Zero-Change Advanced CMOS-SOI Process," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optica Publishing Group, 2019), paper JW2A.78.

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Abstract

Optical ultrasound detection using microring resonators (MRRs) in a zero-change 45nm CMOS-SOI electronic-photonic platform with high intrinsic sensitivity of 39.6 f m/kPa and frequency response of 6MHz is reported.

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