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Broadband GHz ITO-based Plasmon MZI Modulator on Silicon Photonics

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Abstract

Here we demonstrate a spectrally broadband, GHz-fast Mach Zehnder interferometer- based modulator deploying wavelength-compact phase-shifter heterogeneously integrating ENZ- near ITO films into silicon photonics utilizing a plasmonic mode.

© 2020 The Author(s)

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Broadband Sub-λ GHz ITO Plasmonic Mach-Zehnder Modulator in Silicon Photonics

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