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Large thermal tuning of polymer-embedded silicon nitride nanobeam cavity

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Abstract

We experimentally demonstrate a thermally tunable polymer-embedded silicon nitride nanobeam cavity with a tuning efficiency of 44 pm/°C and 0.13 nm/mW in the near-visible wavelength range. The demonstrated resonator paves the path for the future development of low-power reconfigurable silicon nitride integrated photonics platform.

© 2020 The Author(s)

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More Like This
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