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Conferences > CLEO_QELS > 2020 > JTu2B > JTu2B.22

High-Q Ge-As-S Microring Resonators based on improved fabrication process for optical parametric amplifier

Pingyang Zeng, Di Xia, Zelin Yang, Bin Zhang, Yaodong Sun, Yufei Huang, Jingcui Song, Ying Zhu, and Zhaohui Li

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Abstract

We experimentally demonstrate Ge-As-S resonators with intrinsic quality factor more than 1 million through a thermal annealing process (TAP). Preliminary result of optical parametric amplifier (OPA) in the ChG-based resonators can be observed.

© 2020 The Author(s)

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