A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4

Mohammad J. Bereyhi; Amirali Arabmoheghi; Nils J. Engelsen; Tobias J. Kippenberg

doi:10.1364/CLEO_QELS.2021.FTh2P.6

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2021),
paper FTh2P.6
•https://doi.org/10.1364/CLEO_QELS.2021.FTh2P.6

A high-cooperativity, nano-optomechanical system comprised of high stress Si₃N₄

Mohammad J. Bereyhi, Amirali Arabmoheghi, Nils J. Engelsen, and Tobias J. Kippenberg

CLEO: QELS_Fundamental Science 2021

San Jose, California United States
9–14 May 2021
ISBN: 978-1-943580-91-0

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Quantum Optomechanical Systems (FTh2P)

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M. J. Bereyhi, A. Arabmoheghi, N. J. Engelsen, and T. J. Kippenberg, "A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4," in Conference on Lasers and Electro-Optics, J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, and C. Saraceno, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper FTh2P.6.

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Abstract

We report the design fabrication and characterization of a monolithic nano-optomechanical transducer comprised of high stress silicon nitride (Si₃N₄). Our system features a one dimensional Fabry-Pérot photonic crystal cavity (Q ≈ 10⁵) integrated with a high-Q (Q ≈10⁶) nanobeam resonator with optomechanical cooperativity of C₀ = 23.

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