Ultra-coherent fundamental mode mechanical resonators designed using topology optimization

Dennis Høj; Wenjun Gao; Wenjun Gao; Fengwen Wang; Ulrich Busk Hoff; Ole Sigmund; Ulrik Lund Andersen

doi:10.1364/CLEO_QELS.2021.FTh2P.8

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2021),
paper FTh2P.8
•https://doi.org/10.1364/CLEO_QELS.2021.FTh2P.8

Ultra-coherent fundamental mode mechanical resonators designed using topology optimization

Dennis Høj, Wenjun Gao, Fengwen Wang, Ulrich Busk Hoff, Ole Sigmund, and Ulrik Lund Andersen

CLEO: QELS_Fundamental Science 2021

San Jose, California United States
9–14 May 2021
ISBN: 978-1-943580-91-0

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Quantum Optomechanical Systems (FTh2P)

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D. Høj, W. Gao, F. Wang, U. B. Hoff, O. Sigmund, and U. L. Andersen, "Ultra-coherent fundamental mode mechanical resonators designed using topology optimization," in Conference on Lasers and Electro-Optics, J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, and C. Saraceno, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper FTh2P.8.

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Abstract

Topology optimization has been used to optimize the quality factor × frequency product of the fundamental mode of silicon nitride based membranes. A factor of 2.5 enhancement was experimentally demonstrated, showing the potential for topology optimization to revolutionize designs of membranes.

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