Nanoelectromechanical tuning of dual-mode resonant metasurfaces

Tianzhe Zheng; Hyounghan Kwon; Hyounghan Kwon; Andrei Faraon; Andrei Faraon

doi:10.1364/CLEO_QELS.2021.FW2N.4

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2021),
paper FW2N.4
•https://doi.org/10.1364/CLEO_QELS.2021.FW2N.4

Nanoelectromechanical tuning of dual-mode resonant metasurfaces

Tianzhe Zheng, Hyounghan Kwon, and Andrei Faraon

CLEO: QELS_Fundamental Science 2021

San Jose, California United States
9–14 May 2021
ISBN: 978-1-943580-91-0

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Nanophotonic Platforms for Light Manipulation (FW2N)

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T. Zheng, H. Kwon, and A. Faraon, "Nanoelectromechanical tuning of dual-mode resonant metasurfaces," in Conference on Lasers and Electro-Optics, J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, and C. Saraceno, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper FW2N.4.

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Abstract

We demonstrate nanoelectromechanical tuning of dual-mode resonant dielectric metasurfaces. The devices achieve intensity modulation over 40%, > 10kHz speed, and 144° phase shift with 7V bias voltage.

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