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Quantitative analysis by nanoelectromechanical photothermal infrared spectroscopy with picogram sensitivity

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Abstract

We demonstrate an advanced approach for quantitative spectral analysis of volatile chemical compounds with nanoelectromechanical infrared spectroscopy. We present high resolution infrared spectra of caffeine with a sensitivity of 7 pg obtained with SiN trampoline resonators.

© 2021 The Author(s)

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