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High Q-factor microring resonator using local oxidation of silicon (LOCOS) and adiabatic geometry

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Abstract

A single mode adiabatic microring resonator fabricated using local oxidation of silicon technique (LOCOS) is proposed and demonstrated. An ultrahigh loaded Q-factor of ~1 Million with a free spectral range of 2nm is achieved.

© 2021 The Author(s)

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More Like This
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