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Modelling Propagation Loss of PECVD Silicon Nitride Strip Waveguides: Evaluation andAssessment of Width Dependency

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Abstract

Measurements of the width-dependent propagation loss of 250 nm thick silicon nitride strip waveguides at 850 nm wavelength indicate good agreement with the theoretical model. The waveguides were fabricated by plasma-enhanced chemical vapor deposition (PECVD).

© 2021 The Author(s)

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