Abstract
We fabricated ultrahigh Q silica microdisks using conventional photolithog- raphy followed by chemo-mechanical polishing. Through this procedure, optical quality factor exceeding one hundred million was obtained.
© 2021 The Author(s)
PDF Article | Presentation VideoMore Like This
J. Lin, W. Fang, Y. Cheng, S. J. Yu, Y. G. Ma, F. He, L. Qiao, L. Tong, and Z. Xu
CTh5C.9 CLEO: Science and Innovations (CLEO:S&I) 2012
T.J. Kippenberg, D.K. Armani, S.M. Spillane, and K.J. Vahala
CMM1 Conference on Lasers and Electro-Optics (CLEO:S&I) 2003
T. J. Kippenberg and K.J. Vahala
CFH5 Conference on Lasers and Electro-Optics (CLEO:S&I) 2007