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WDM integrated silicon nano-slab photodetector for short-reach datacom on silicon nitride-on-SOI platform

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Abstract

We demonstrate 1X6 SiN echelle grating filters integrated with silicon nano-slab metal-semiconductor-metal photodetector for SWDM based short-reach interconnect. Echelle grating measures 4.3 dB insertion loss and 22 dB crosstalk. Photodetector records 0.59 A/W responsivity.

© 2021 The Author(s)

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