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Conferences > CLEO_QELS > 2022 > FF2D > FF2D.4

Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang, Shengyuan Chang, Xi Chen, Yimin Ding, Md Tarek Rahman, Yao, Duan, Pavel Terekhov, and Xingjie Ni

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Abstract

We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 µm fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

© 2022 The Author(s)

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