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Conferences > CLEO_QELS > 2022 > FM4F > FM4F.7

Metaphotonic Color-Routing Nanostructures for Sub-micron Scale CMOS Image Sensors

Sangyun Lee, Sookyoung Roh, Hongkyu Park, Minwoo Lim, Sungmo Ahn, Hyuck Choo, and Seokho Yun

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Abstract

We design color-routing nanostructures that can spectrally guide light into a Bayer array. To demonstrate, we fabricated 1.0-0.5 um pixel Bayer arrays composed of TiO2 nanoposts and imaged the color-routing focal plane under white light illumination.

© 2022 The Author(s)

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