One step non-contact fabrication of polymer microlens arrays by thermocapillary lithography

Euan McLeod; Sandra M. Troian

doi:10.1364/CLEO_SI.2011.CML3

CLEO:2011 - Laser Applications to Photonic Applications
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper CML3
•https://doi.org/10.1364/CLEO_SI.2011.CML3

One step non-contact fabrication of polymer microlens arrays by thermocapillary lithography

Euan McLeod and Sandra M. Troian

CLEO: Science and Innovations 2011

Baltimore, Maryland United States
1–6 May 2011
ISBN: 978-1-55752-910-7

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3D Nano Fabrication (CML)

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E. McLeod and S. M. Troian, "One step non-contact fabrication of polymer microlens arrays by thermocapillary lithography," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper CML3.

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Abstract

Thermocapillary lithography, a continuous-relief patterning technique, is used to fabricate polymer microlens arrays with variable pitch and focal length. Pattern definition results from sculpting by thermocapillary forces imposed by a cooled mask.

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