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Conferences > CLEO_SI > 2011 > CThHH > CThHH2

Low-Loss Polysilicon Waveguides Suitable for Integration within a High-Volume Electronics Process

Jason S. Orcutt, Sanh D. Tang, Steve Kramer, Hanqing Li, Vladimir Stojanović, and Rajeev J. Ram

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Abstract

Polysilicon waveguides are fabricated in a 300 mm wafer process representative of a complete high-volume electronic memory process. 6.2 dB/cm end-of-line loss is measured for narrow waveguides with a confinement factor scaling of 5.1 cm−1.

© 2011 Optical Society of America

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