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Conferences > CLEO_SI > 2011 > CThQ > CThQ4

A Novel Mechano-Optical Sensor based on Read-out with a Si3N4 Grated Waveguide

S. V. Pham, M. Dijkstra, H. A. G. M. van Wolferen, M. Pollnau, G. J. M. Krijnen, and H. J. W. M. Hoekstra

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Abstract

A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

© 2011 Optical Society of America

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