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Conferences > CLEO_SI > 2012 > CF1B > CF1B.6

Frequency-doubled Supercontinuum for Scanning White-light Interferometry

Piotr Ryczkowski, Goëry Genty, Anton Nolvi, Ivan Kassamakov, and Edward Hæggström

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Abstract

We present a compact, broadband source with tunable repetition rate working in the visible/near-infrared for scanning white-light interferometry. Three-dimensional characterization of MEMS with 7 micron axial resolution is demonstrated.

© 2012 Optical Society of America

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